Series GFC Gas Mass Flow Controllers

Gas Mass Flow Controllers
Flow Range Up to 1000 L/min, Pressures Up to 1000 psi, NIST Traceable

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Flow Range Up to 1000 L/min, Pressures Up to 1000 psi, NIST Traceable

The SERIES GFC Gas Mass Flow Controllers combine a straight tube sensor with a restrictor flow element. It is available for flow ranges up to 1000 L/min and offered in aluminum or 316 SS in 1/4", 3/8", 1/2" and 3/4" sizes.

Product Applications

Gas flow measurement
Gas flow control
Operating pumps and valves
Process equipment
Vacuum processes
Glass and metal coating
Film depostition

More Information

Model Chart

EXAMPLE	GFC	11	00	0.50	CCL2FCCLF2	24VDC	Series GFC-1100-0.50-CCL2FCCLF2-24VDC Gas Mass Flow Meter, aluminum, 0.50 LPM Trichloro, with 24 VDC option.
SERIES	GFC						Gas Mass Flow Meter
MATERIAL		11 21					Aluminum SST
RANGE			00 01 02 03 04 05 06 07 08 09 11 31 33 42 43 44 45				No Range for Specialty Gas Only 10 SCCM Nitrogen 20 SCCM Nitrogen 50 SCCM Nitrogen 100 SCCM Nitrogen 200 SCCM Nitrogen 500 SCCM Nitrogen 1 LPM Nitrogen 2 LPM Nitrogen 5 LPM Nitrogen 15 LPM Nitrogen 30 LPM Nitrogen 50 LPM Nitrogen 100 LPM Nitrogen 200 LPM Nitrogen 500 LPM Nitrogen 1000 LPM Nitrogen
RANGE OF SPECIALTY GAS				XX.X			Desired Flow of Gas (in LPM)
SPECIALTY GAS K FACTOR AND DESIRED GAS					CCL2FCCLF2 C2H2F2 C4H6 C4H8 C3H12 C4H8CIS C4H8TRANS C2H2 AIR NH3 AR ASH3 BR3 BCL3 BF3 BR2 BRF5 BRF3 CBRF3 C4H10 CO2 CS2 CO CCL4 COF2 COS CL2 CLF3 CHCLF2 CHCL3 C2CLF5 CCLF3 C2N2 CICN C3H5 D2 B2H6 CBR2F2 CHCL2f CCL2F2 (CH3) 2SICL2 SIH2CL2 (CH3) 2O (CH3) 2NH C2H6 C2H6O C2H5CL C2H4 C2H4O F2 CHF3 CCL3F CCL2FCCLF2 C2H2F2 C2CL2F4 C2CLF5 C2F6 CCL2F2 CCLF3 CBRF3 CF4 CHCL2F CHCLF2 CHF3 C4F6 GEH4 GECL4 HE C2F6 C6H14 H2 HBR HCL HCN HF HI H2SE H2S IF5 CH (CH3) 3 KR CH4 CH3 C3H4 CH2BR CH3CL CH3F CH3SH (CH3) SICL3 MOF6 C2H5NH2 CH3NH2 NE NO N2 NO2 NF3 NOCL N20 C4F6 02 OF2 OZONE B5H9 C5H12 CLO3F C3F8 COCL2 PH3 POCL3 PH5 PCL3 C3H8 C3H6 SIH4 SICL4 SIF4 SO2 SF6 SO2F2 CF3CH2F N2F4 TICL4 C2HCL3 CCL3F SIHCL3 (C4H9) AL (CH3) 3N WF6 UF6 CH2CHBR CH2CHCL XE		0.2031 1,1,2 - Trichloro - 1,2,2 Trifluoroethane (Freon - 113) 0.4271 1,1 - Difluoroethylene (Freon - 1132A) 0.3224 1,3 - Butadiene 0.2994 1 - Butane 0.2170 2,2 - Dimethylpropane 0.3240 2 - Butane 0-2910 2 - Butane 0.5829 Acetylene 1.0000 Air 0.7310 Ammonia 1.4573 Argon 0.6735 Arsine 0.3800 Boron Tribromide 0.4089 Boron Trichloride 0.5082 Boron Triflouride 0.8083 Bromine 0.2600 Bromine Pentaflouride 0.3855 Bromine Triflouride 0.3697 Bromotrifluoromethane (Freon - 13B1) 0.2631 Butane 0.7382 Carbon Dioxide 0.6026 Carbon Disulfide 1.0000 Carbon Monoxide 0.3100 Carbon Tetrachloride 0.5428 Carbonyl Fluoride 0.6606 Carbonyl Sulfide 0.8600 Chlorine 0.4016 Chlorine Triflouride 0.4589 Chlorodifluoromethane (Freon - 22) 0.3912 Chloroform 0.2418 Chloropentafluoroethane (Freon - 115) 0.3834 Chlorodifluoromethane (Freon - 13) 0.6100 Cyanogen 0.6130 Cyanogen chloride 0.4584 Cyclopropane 1.0000 Deuterium 0.4357 Diborane 0.1947 Dibromodifluoromethane 0.4252 Dichlofluoromethane (Freon -21) 0.3538 Dichlorodifluoromethane (Freon 12) 0.2522 Dichloromethylsilane 0.4044 Dichlorosilane 0.3896 Dimethyl Ether 0.3714 Dimethylamine 0.5000 Ethane 0.3918 Ethanol 0.3891 Ethyl Chloride 0.6000 Ethylene 0.5191 Ethylene Oxide 0.9784 Fluorine 0.4967 Fluoroform (Freon - 23) 0.3287 Freon -11 0.2031 Freon - 113 0.4271 Freon - 1132A 0.2240 Freon - 114 0.2418 Freon - 115 0.2421 Freon - 116 0.3538 Freon - 12 0.3834 Freon - 13 0.3697 Freon - 13B1 0.4210 Freon - 14 0.4252 Freon - 21 0.4589 Freon - 22 0.4967 Freon - 23 0.1760 Freon - C318 0.5696 Germane 0.2668 Germanium Tetrachloride 1.4540 Helium 0.2421 Hexafluoroethane (Freon - 116) 0.1792 Hexane 1.0106 Hydrogen 1.0000 Hydrogen Bromide 1.0000 Hydrogen Chloride 1.0700 Hydrogen Cyanide 0.9998 Hydrogen Fluoride 0.9987 Hydrogen Iodide 0.7893 Hydrogen Selenide 0.8000 Hydrogen Sulfide 0.2492 Iodine Pentaflouride 0.2700 Isobutane 1.4530 Krypton 0.7175 Methane 0.5843 Methanol 0.4313 Methyl Acetylene 0.5835 Methyl Bromide 0.6299 Methyl Chloride 0.6800 Methyl Fluoride 0.5180 Methyl Mercaptan 0.2499 Methyl Trichlorosilane 0.2126 Molybdenum Hexafluoride 0.3512 Monoethylamine 0.5100 Monomethylamine 1.4600 Neon 0.9900 Nitric Oxide 1.0000 Nitrogen 0.7370 Nitrogen Dioxide 0.4802 Nitrogen Triflouride 0.6134 Nitrosyl Chloride 0.7128 Nitrous Oxide 0.1760 Octafluorocyclobutane (Freon - C318) 0.9926 Oxygen 0.6337 Oxygen Difluoride 0.4460 Ozone 0.2554 Pentaborane 0.2134 Pentane 0.3950 Perchloryl Fluoride 0.1740 Perfluoropropane 0.4438 Phosgene 1.0700 Phosphine 0.3600 Phosphorous Oxychloride 0.3021 Phosphorous Pentaflouride 0.3000 Phosphorous Trichloride 0.3500 Propane 0.4000 Propylene 0.5982 Silane 0.2840 Silicon Tetrachloride 0.3482 Silicone Tetrafluoride 0.6900 Sulfur Dioxide 0.2635 Sulfur Hexafluoride 0.3883 Sulfuryl Fluoride 0.5096 Tetrafluoroethane (Forane - 134A) 0.3237 Tetrafluorohydrazine 0.2691 Titanium Tetrachloride 0.3200 Trichloro Ethylene 0.3287 Trichlorofluoromethane (Freon - 11) 0.3278 Trichlorosilane 0.0608 Triisobutyl Aluminum 0.2792 Trimethylamine 0.2541 Tungsten Hexafluoride 0.1961 Uranium Hexafluoride 0.4616 Vinyl Bromide 0.4800 Vinyl Chloride 1.4400 Xenon
OPTIONS						-24VDC -B -E -K -SPCL	24 VDC Buna-N O'rings EPR/EPDM O'rings Perfluoroelastomer O'rings Special Cleaning

Specifications

Service:Clean gases compatible with wetted parts.
Wetted Materials:GFC-1XXX: Anodized aluminum, brass, 316 SS and fluoroelastomer O-rings; GFC-2XXX: 316 SS and fluoroelastomer O-rings.
Accuracy:±1% FS including linearity over 59 to 77°F (5 to 25°C) and 5 to 60 psia (0.34 to 4 bar); Series GFC X143, X144, X145, ±1.5% FS.
Repeatability:±0.5% of FS.
Response Time:2 seconds to within ±2% of actual flow.
Output:Linear 0 to 5 VDC and 4 to 20 mA.
Maximum Particulate Size:5 microns.
Temperature Limits:32 to 122°F (0 to 50°C).
Power Supply:±12 VDC.
Process Connections:1/4" compression fitting for flow rates ≤50 L/m; 3/8" for 100 and 200 L/m; 1/2" for 500 L/min; 3/4" for 1000 L/min.
Pressure Limits:1000 psig (68.9 bar); Series GFC-X143, X144, X145, 500 psig (34.5 bar).
Leak Integrity:1 x 10^-9 sccs of He.
Display:90° tiltable, 3-1/2 digit.
Agency Approvals:CE.

Features

Provides high accuracy and repeatability
Flow rates are virtually unaffected by temperature and pressure variations
Utilizes an electromagnetic valve and PID electronics to maintain continuous control by comparing measured sensor signal set to flow rates
Set points can be adjusted with local potentiometers or remotely via 0 to 5 VDC or 4 to 20 mA analog signal
Actual gas flow is displayed in engineering units on a 3-1/2 digit, 90° tiltable LCD readout
Can be used with Series GFT2 Flow Totalizer for applications requiring totalization
NIST traceable certificate included

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